PSD及其在非接触测量中的应用  

PSD and its application in noncontact measurement

作　　者：林华[1] 王晓秋[1] 

机构地区：[1]长春邮电学院电信工程系

出　　处：《激光技术》1998年第1期52-54,共3页Laser Technology

摘　　要：介绍了一种光电位敏探测器ＰＳＤ及其在非接触测量中的应用，同时给出测量原理和ＰＳＤ的前置适配电路。This paper introduces a position sensitive detector and a noncontact position detection system.The system include a laser diode light source,a imaging optical system and a image position sensitive detector.The surface of a body is illuminated with the light source and imaged on the sensitive surface of the detector.According to the relationship between the body and its image ,the deviation of the body can be calculated.The measurement accuracy of the deviation depends on the position discriminativity.In our system,the position discriminativity of the detector is 2 micron,the measurement error is less than 5 micron.

关 键 词：光电位敏探测器 激光器 位敏探测器 非接触测量 

分 类 号：TN348.06[电子电信—物理电子学] TH744.5[机械工程—光学工程]