CVD金刚石厚膜力学性能  

The mechanical properties of CVD diamond thick films

作　　者：皮华滨[1] 熊军[1] 汪建华[1] 王传新[1] 吴雪梅[2] 

机构地区：[1]武汉工程大学湖北省等离子体化学与新材料实验室,湖北武汉430074 [2]江苏大学江苏省薄膜材料重点实验室,江苏苏州215006

出　　处：《武汉工程大学学报》2009年第1期51-53,57,共4页Journal of Wuhan Institute of Technology

基　　金：湖北省自然科学基金(2007ABA006);湖北省教育厅重点项目(2007)

摘　　要：CVD金刚石厚膜的力学性能对CVD金刚石厚膜刀具的寿命有重要影响.研究了微波等离子体CVD和热丝CVD法制备的金刚石膜断裂强度以及耐磨性等力学性能,利用比重测量、SEM、X-ray、拉曼光谱等方法对两种厚膜进行了测试.结果表明微波等离子体CVD制备的金刚石厚膜质量、比重和断裂强度要明显高于热丝CVD法制备的金刚石膜,并且具有更好的耐磨性.内部的空洞等缺陷以及晶界的非金刚石相碳含量较多是造成热丝CVD厚膜性能低下的主要原因.The mechanical properties of CVD diamond flim is highly related to the cutting tools＇ life span. The authors studied the fracture strength and wear resistance of MPCVD and HFCVD diamond flim. Specific gravity test method, X-ray spectrum, SEM and Raman spectrum were used to study the diamond thick films. Results show that the quality, specific gravity and the fracture strength of the MPCVD diamond films are better than the HFCVD diamond films, and the former is more wearable. The main reason of low efficiency of mechanical properties of CVD diamond film is that internal cavity defects and that non-diamond phase carbon is higher in grain boundary.

关 键 词：CVD金刚石 断裂强度 耐磨性 

分 类 号：TQ164[化学工程—高温制品工业]