玻璃-PDMS微流控芯片制备工艺  

Fabrication of glass/PDMS micro-fluidic chips

作　　者：程莉莉[1,2] 余冬冬[1,2] 邓晓清[1,2] 王升高[1,2,3] 李艳琼[1,2] 汪建华[1,2,3] 

机构地区：[1]武汉工程大学湖北省等离子体化学与新材料重点实验室,湖北武汉430074 [2]武汉工程大学材料科学与工程学院,湖北武汉430074 [3]绿色化工过程省部共建教育部重点实验室,湖北武汉430074

出　　处：《武汉工程大学学报》2009年第1期58-61,共4页Journal of Wuhan Institute of Technology

基　　金：国家自然科学基金(50572075);武汉市科技攻关项目(200710421119);武汉工程大学研究生创新基金资助

摘　　要：以玻璃为基片的微流控芯片在制备方面存在制作成本偏高及加工周期较长等问题.本研究以廉价的载玻片为微流控芯片基片材料,以铬膜为牺牲层,通过优化光刻和湿法刻蚀工艺,得出较为优异的湿法刻蚀条件,制备出了较佳结构的玻璃微沟道.将其与PDMS进行不可逆封接后,获得了玻璃-PDMS芯片.该工艺简单,且有效地降低了芯片的制作成本.电渗性能测试结果表明,该芯片电渗性能稳定、良好.There are many problems on the preparation of micro-fluidic chip with the slide glass as substrate, such as the high manufacture cost and the long-producing cycle. After optimizing lithography and wet-etching techniques, the glass channel with the slide glass as the substrate material was made. Then the glass with channel was sealed with poly（dimethylsiloxane） PDMS and received the glass/ PDMS micro-fluidic chips at last. This method was easy and also could decrease the fabricating cost. The result of electroosmosis study shows that the performance of this chip was steady and great.

关 键 词：微流控芯片 PDMS 电渗 电泳 

分 类 号：O657[理学—分析化学]