一种环形波导微波等离子体装置  

A Microwave Plasma System with Ring Waveguide

作　　者：冯剑[1,2] 张贵新[1] 刘亮[3] 王淑敏[1] 张庆[1] 

机构地区：[1]清华大学电机工程与应用电子技术系,北京100084 [2]河北省石家庄市供电公司,石家庄050021 [3]华北电力科学研究院,北京100045

出　　处：《高电压技术》2009年第1期48-53,共6页High Voltage Engineering

基　　金：国家自然科学基金(50477005)~~

摘　　要：微波等离子体可以通过无极放电方式产生,相对其它放电方式而言,容易在高气压下维持较高容量,有较好的工业应用价值,但目前在较高气压下使用的微波等离子体装置还不成熟。为此,介绍了一种新型的微波等离子体反应腔,包括该腔体的结构和设计原理,并将其与现有的纯狭缝式微波反应腔作了比较,以说明两缝结合腔体的优点;通过引入喷气电离管前后微波激发所需要的能量变化以说明电离管的作用:它利用环形波导的狭缝天线和大缝向腔内传输微波以激发和维持等离子体,这种两缝结合的形式使反应腔内高场强区域扩大,有助于大面积等离子体的产生;同时,该腔体还配套有一喷气电离管,通过其产生的电离流的作用,有效降低了微波激发等离子体所需的能量。通过摄像头观察到的实验现象表明,在大气压下其产生的等离子体是相对均匀的,且覆盖面积大,可有效的应用于工业中。The research on plasma devices under higher pressure has not been developed deeply. We introduces a new microwave plasma generator, which can excite plasma by the function of slot antennae and an extra slot on the inwall of the ring waveguide around the cavity. This structure with two different kinds of slot can expand the area of high electric field, benefiting the production of large area plasma. Moreover, an air-blast ionization jet is supported to help reduce the microwave power input on plasma exciting by the effect of ionization stream. We present the structure and design of the generator, compare the generator with common narrow slots antenna cavity to show the advantages, and show the function of ionization jet by analyzing the change of the power input with or without the ionization stream. Through the appearance observed by the camera, homogenous plasma with large area can be produced at one atmospheric pressure.

关 键 词：微波 等离子体 环形波导 大气压 电离管 反应腔 

分 类 号：TN136[电子电信—物理电子学]