细长金属管内产生的直流辉光等离子体发射光谱诊断  

Diagnosis of the DC Glow Discharge Plasma Generated Inside a Metallic Tube by Optical Emission Spectroscopy

作　　者：尹利勇[1] 温小琼[1] 王德真[1] 

机构地区：[1]大连理工大学物理与光电工程学院,三束材料表面改性国家重点实验室,辽宁大连116024

出　　处：《光谱学与光谱分析》2008年第12期2745-2748,共4页Spectroscopy and Spectral Analysis

基　　金：国家自然科学基金项目(50307002)资助

摘　　要：利用发射光谱法对金属管内形成的稳定氩氮直流辉光等离子体进行了诊断。通过对等离子体发射光谱谱线的研究确定了等离子体中的活性粒子成分;根据氩原子的玻尔兹曼曲线斜率法计算了等离子体中的电子激发温度;采用氮分子第二正带系跃迁(C3Πu→B3Πg)的发射谱线计算了等离子体中的氮分子振动温度;研究了电子激发温度和氮分子振动温度随压强的变化特征。研究结果表明,在20 Pa下产生的Ar60%+N240%直流辉光等离子体中,活性成分主要是Ar原子、Ar离子、N2的第二正带系跃迁(C3Πu→B3Πg)和N2+的第一负带系跃迁(B2Πu+→X2Σg+);电子激发温度约为(15 270±250)K;氮分子(C3Πu)振动温度约为(3 290±100)K;随着压强的增加电子激发温度、分子振动温度逐渐降低。文章的研究结果对细长金属管内表面改性研究具有重要的意义。Optical emission spectroscopy method was used to diagnose the normal dc glow discharge plasma generated inside a metallic tube.The active species in the plasma were identified.The electron excitation temperature in the plasma was determined by the Boltzmann plot method.The vibrational temperature of N2 molecules in the plasma was determined by analyzing the emission spectrum lines of the N2 second positive system（C^3Πu→B^3Πg）.The dependence of the electron excitation temperature and molecular vibrational temperature on the pressure was investigated.The experiment results show that in the Ar60%＋N240% glow discharge plasma at 20 Pa,the active species are the Ar atoms,Ar ions,second positive series of N2 transitions and the first negative series of B^2Πu^2→X^2Σg^＋ transitons;the electron excitation temperature is（15 270±250） K, and the vibrational temperature of N2 molecules is（3 290±100） K.The electron excitation temperature and molecular vibrational temperature decrease with increasing pressure.These results would give some valuable guide to the study on inner surface modification of metallic tubes.

关 键 词：细长金属管 直流辉光放电 发射光谱 电子激发温度 分子振动温度 

分 类 号：O53[理学—等离子体物理]