近空间升华法制备CdS多晶薄膜的研究  

Research on the Polycrystalline CdS Thin Films Prepared by Close-Spaced Sublimation

作　　者：杨定宇[1,2] 夏庚培[1] 郑家贵[1] 冯良桓[1] 蔡亚平[1] 

机构地区：[1]四川大学材料科学与工程学院,四川成都610064 [2]成都信息工程学院光电技术系,四川成都610225

出　　处：《光谱学与光谱分析》2009年第1期56-61,共6页Spectroscopy and Spectral Analysis

基　　金：国家“863”重点项目(2001AA513010);四川省应用基金(2006J13-083);中国高校博士点基金(20050610024)资助

摘　　要：系统地研究了近空间升华法(CSS)制备CdS薄膜沉积速率的影响因素。发现CdS薄膜的沉积速率随升华源温度的升高而增大,但随衬底温度和沉积气压的上升而下降。对所制备样品的结构、表面形貌和光谱透过率特性进行了测试,结果表明:(1)不同氧分压下沉积的CdS薄膜沿(103)晶向择优生长。CdCl2氛围下退火后,(103)晶向的优势得到进一步加强;(2)不同氧分压制备的CdS薄膜致密且粒径均匀,晶粒的大小随着衬底温度的升高而增大,但薄膜的粗糙度也随之增大;(3)随着CdS薄膜厚度的减小,可见光中短波段的透过率有所增大,有利于提高太阳电池的短波光谱响应。并将CSS制备的CdS多晶薄膜用于CdTe太阳电池的制作,获得了10.29%的光电转换效率,初步验证了该制作工艺的可行性。In the present paper,the factors of influence on the deposition rate of CdS films prepared by close-spaced sublimation（CSS） were first studied systematically,and it was found from the experiments that the deposition rate increased with the raised temperature of sublimation source,while decreased with the raised substrate temperature and the deposition pressure. The structure,morphology and light transmittance of the prepared samples were tested subsequently,and the results show：（1） The CdS films deposited under different oxygen partial pressure all present predominating growth lattice orientation（103）,and further more the films will be strengthened after annealed under CdCl2 atmosphere.（2） The AFM images of CdS show that the films are compact and uniform in grain diameter,and the grain size becomes larger with the increased substrate temperature.Along with it,the film roughness was also augmented.（3） The transmittance in the shortwave region of visible light through the CdS films would be enhanced when its thickness is reduced,and that will help improve the shortwave spectral response of CdTe solar cells.Finally,the prepared CdS films were employed to fabricate CdTe solar cells,which have achieved a conversion efficiency of 10.29%,and thus the feasibility of CSS process in the manufacture of CdTe solar cells was validated primarily.

关 键 词：CDTE太阳电池 近空间升华法 CdS多晶薄膜 

分 类 号：TK514[动力工程及工程热物理—热能工程]