介电电泳芯片的结构设计与模拟分析进展  

Development of Structural Design and Simulation Analysis for Dielectrophoresis Microchips

作　　者：曾雪[1,2] 徐溢[1,2,3] 曹强[1] 郝敦玲[1] 吴永杰[1] 

机构地区：[1]重庆大学化学化工学院,重庆400030 [2]重庆大学新型微纳器件与系统技术国防重点学科实验室,重庆400030 [3]重庆大学微纳系统及新材料技术国际研发中心,重庆400030

出　　处：《微纳电子技术》2009年第1期34-40,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(20675089);科技部863计划项目(2006AA04Z345);国际科技合作项目(2006DFA13510);重庆市自然科学基金重点项目(CSTC;2006BA4012)

摘　　要：综述了国内外微流控芯片介电电泳(DEP)的研究进展和介电电泳芯片的主要结构设计方案。依据芯片电极结构设计的不同,将介电电泳芯片分为阵列电极DEP芯片、抛物线电极DEP芯片、绝缘微柱DEP芯片及其他设计DEP芯片四大类。分别对芯片电极结构设计所采用的模拟分析进行了归纳和综述,重点探讨了如何通过电场模拟分析手段对芯片结构参数进行优化,分析了流体分布与热效应对芯片效能的影响,列举了不同电极结构设计的DEP芯片的工作效率及实际应用效果。提出了目前采用模拟分析方法进行芯片结构设计存在的问题,进而对基于MEMS技术的DEP芯片的设计和应用前景进行了展望。The research and development of microfluidic dielectrophoresis （DEP） on microchips and the structural design of DEP microchips are reviewed. According to the different structural designs of the micro-electrodes on DEP chips, the DEP microchips are classified into four kinds, arrayed electrode chip, parabolic electrode chip, insulator-based microcolumn chip and other specially designed electrode chip. The methodology of simulation analysis for structural design of the DEP microchip is discussed, and much more attention is paid to the optimation process of microchip structural parameters by the way of electric field simulation. The influence of the liquid distribution and thermal distribution on the efficiency of the DEP microchip is analyzed. The analytical results and practical application of the DEP microchip with different micro-elec- trodes are also listed out. The problems of the methodology of simulation analysis for structural design of the DEP microchip is presented. Furthermore, the research prespective on the design and application of DEP microchips based on the MEMS techniques is proposed.

关 键 词：介电电泳 微流控芯片 电场模拟 微电极设计 芯片结构优化 

分 类 号：TH703[机械工程—仪器科学与技术] Q66[机械工程—精密仪器及机械]