增厚-光胶法控制超薄、变形平面零件的加工工艺研究  

Processing control for deformable super-thin planar elements with thicken-optical-cement method

作　　者：苏瑛[1] 丛丽艳[1] 常阿娟[1] 张云龙[1] 郭芮[1] 

机构地区：[1]西安应用光学研究所,陕西西安710065

出　　处：《应用光学》2009年第1期93-95,共3页Journal of Applied Optics

摘　　要：以一直径为27mm,N=2,ΔN=0.5,B≤和θ≤2′的K9平面零件加工为例,详细介绍了增厚-光胶法控制超薄、变形平面的加工工艺流程及采取的关键工艺措施,并对加工过程中的参数进行了分析和总结,最后确定了保证该零件各项指标的量化参数。实践证明:该方法能够保证零件高精度面形及平行差要求,解决了超薄、变形零件在长期加工中出现的合格率低、返工率高现象。该方法在保证零件精度的同时,大大提高了生产效率,降低了成本,适用于批量加工。Taking the fabrication of a K9 planar part with the diameter of 27 mm, accuracy requirement of N=2,△N=0.5,B≤Ⅱand θ≤2′ as an example, the Drocessing flow and kevtechniques of deformable super-thin planar elements controlled by thicken-optical contact method are described. The parameters in manufacturing process are analyzed and summarized, and the parameters for achieving various specifications are determined. The result proves that this method can meet the requirements of high-precision surface profile and parallelism. The production efficiency was increased and the production cost was decreased while the accuracy of such optical element was ensured. This method is suitable for the mass production.

关 键 词：增厚-光胶法 超薄光学元件 平面变形 光学加工 

分 类 号：TN204[电子电信—物理电子学]