非晶态TeO2／36°Y-X LiTaO3 SAW基板  

Amorphous TeO_2/36°Y-X LiTaO_3 Substrates for SAW Application

作　　者：商晓莉[1] 公勋[1] 熊军[1] 章德[1] 

机构地区：[1]南京大学电子科学与工程系,近代声学教育部重点实验室,江苏南京210093

出　　处：《压电与声光》2009年第1期4-5,8,共3页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(10404014)

摘　　要：研究了非晶态TeO2/36°Y-X LiTaO3层状结构的延迟温度系数(TCD),并计算了该结构中声表面波(SAW)的其他重要特性,如声波模式和机电耦合系数(k2)。非晶态TeO2薄膜作为一种新型具有负温度系数的材料,当将其沉积于具有正温度系数的36°Y-X LiTaO3上时,在膜厚仅为传统SiO2薄膜的1/3情况下就可实现零延迟温度系数。另外,该结构中被利用的1阶Love波模式很纯,没有和其他模式明显的耦合,而且其k2高达8.61%。故此结构是一种具有广泛应用前景的新型复合SAW应用材料。The temperature coefficient of delay （TCD） of the amorphous TeO2/36°Y-X LiTaO3 layered struc- ture had been investigated. Other properties such as the mode of acoustic wave and the electromechanical coupling coefficient （k2 ） had also been calculated. It was found that the amorphous-TeO2 film with negative TCD was deposi- ted on 36° rotated Y-X LiTaO3 which had a positive TCD. A zero TCD could be yielded while its film thickness was only 1/3 of the conventional SiO2 film. Furthermore, the 1st Love wave mode used in the structure was very pure and its k2 of around 8.61 % was very high, with no obvious coupling with other modes. The structure was a new pro- spective material for SAW application.

关 键 词：延迟温度系数(TCD) 非晶态TeO2薄膜 36°Y-X LITAO3 LOVE波 层状结构 声表面波(SAW) 

分 类 号：O42[理学—声学]