基于模糊推理的半导体生产重调度策略研究  

Fuzzy-reasoning-based rescheduling strategy for semiconductor manufacturing

作　　者：乔非[1] 李莉[1] 马玉敏[1] 王遵彤[1] 施斌[1] 

机构地区：[1]同济大学电子与信息工程学院,上海200092

出　　处：《计算机集成制造系统》2009年第1期102-108,116,共8页Computer Integrated Manufacturing Systems

基　　金：国家自然科学基金资助项目(70531020;60674076);国家教育部新世纪优秀人才支持计划资助项目(NCET-07-0622)~~

摘　　要：半导体生产重调度策略重点解决重调度的判定和重调度方法的选择,鉴于这两类问题中都涉及到大量随机和不确定因素,提出一种基于模糊Petri网模型的模糊推理方法。首先定义了由七类元素构成的面向重调度策略判定的模糊Petri网模型,继而详细讨论了基于该模糊Petri网模型的模糊推理过程。最后,以实际半导体生产线为背景,针对因设备故障引发的重调度问题,运用文中所提出的方法进行推理,说明了该方法的可行性。Rescheduling strategy of semiconductor manufacturing emphasized on two aspects： rescheduling judgment and rescheduling method selection. Since large amount of stochastic and uncertain factors were involved in these two problems, a fuzzy reasoning methodology based on fuzzy Petri nets was proposed. After a Fuzzy Petri Net model oriented to Rescheduling Strategy （FPN-RS） structured by seven elements was defined, the reasoning methodology based on FPN RS were discussed. Finally, the application and feasibility of the proposed FPN-RS model and modelbased reasoning methodology were illustrated by a case study of practical semiconductor manufacturing.

关 键 词：模糊推理 半导体生产 重调度策略 PETRI网 建模 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]