非晶态碳膜在红外光学零件上的应用  

The Application of Amorphous Carbon Film to the Infrared Devices and its Design Parameters

作　　者：钱苗根[1] 蒋学渊[1] 

机构地区：[1]上海交通大学晶体与薄膜研究室

出　　处：《激光与红外》1990年第5期42-44,共3页Laser & Infrared

摘　　要：非晶态碳膜具有许多接近于金刚石的、令人感兴趣的性能,能很好地用作红外零件上的保护膜和增透膜。本文叙述了非晶态碳膜的制备及光学性能等。The amorphous carbon film has interesting properties which are close to those of diamond. It may be good used for the antiabrasion layers and antireflexions films of the infrared devices. The preparation and optic propertics of the amorphous carbon are presented in this report.

关 键 词：非晶态 碳膜 红外 光学器件 

分 类 号：TN214[电子电信—物理电子学]