有机硅烷/稀土复合自组装膜的制备与摩擦磨损特性  

The Preparation and Friction and Wear Behavior of Organicsilicone/Rare-earth Composite Film

作　　者：顾勤林[1] 程先华[1] 

机构地区：[1]上海交通大学机械与动力工程学院,上海200240

出　　处：《上海交通大学学报》2009年第1期84-87,共4页Journal of Shanghai Jiaotong University

基　　金：国家自然科学基金资助项目(50475023)

摘　　要：利用分子自组装技术在单晶硅表面制备有机硅烷/稀土复合自组装膜,利用接触角测定仪、原子力显微镜和X射线光电子能谱仪分析表征了薄膜的组成和结构,采用UMT-2MT型摩擦磨损试验机评价薄膜的摩擦磨损性能.研究结果表明:通过3-氨基丙基三乙氧基硅烷硅烷偶联剂在单晶硅基片表面的成功组装,获得了较为均匀的硅烷化表面,而稀土元素可以组装到磷化后的硅烷化表面;在较低载荷下,有机硅烷/稀土复合薄膜不但具有较低的摩擦系数,同时也表现出良好的耐磨性和摩擦稳定性,显示其在微机构表面改性的潜在应用前景.The composite film of nanometer rare-earth/silicon coupling reagent 3-Aminopropyltriethoxysilane （APTES） was prepared on the hydroxylated single-crystal silicon substrate by a self-assembling process from specially formulated solution. Chemical compositions and surface morphology of the films were analyzed by means of atomic force microscope （AFM）, contact angle measurements and X-ray photoelectron spectroscopy （XPS）. The tribological properties of the films sliding against GCr15 steel ball were evaluated on a UMT-2MT reciprocating friction and wear tester. The experimental results show that rare earth （RE） can be easily incorporated in the phosphorlated APTES-SAMs and lead to changed surface state of the composite film. Moreover, organiesilicone/ RE composite film is effective in reducing friction and resisting wear compared with APTES-SAMs and phosphorylated APTES-SAMs as it slides against the steel counterpart at a small load, indicating its promising applications in microelectromechanical system （MEMS） field.

关 键 词：3-氨基丙基三乙氧基硅烷 稀土 自组装分子膜 摩擦磨损性能 

分 类 号：TH117.3[机械工程—机械设计及理论]