Measuring In-Plane Micro-Motion of Micro-Structure Using Optical Flow  

作　　者：金翠云 靳世久 栗大超 王建林 

机构地区：[1]College of Information Science and Technology, Beijing University of Chemical Technology [2]State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University

出　　处：《Transactions of Tianjin University》2009年第1期19-22,共4页天津大学学报（英文版）

基　　金：Supported by Youth Natural Science Foundation of Beijing University of Chemical Technology (No.QN0734).

摘　　要：Optical flow method is one of the most important methods of analyzing motion images. Optical flow field is used to analyze characteristics of motion objects. According to motion features of micro-electronic mechani-cal system (MEMS) micro-structure, the optical algorithm based on label field and neighborhood optimization is presented to analyze the in-plane micro-motion of micro-structure. Firstly, high speed motion states for each fre-quency segment of micro-structure in cyclic motion are frozen based on stroboscopic principle. Thus a series of dynamic images of micro-structure are obtained. Secondly, the presented optical algorithm is used to analyze the image sequences, and can obtain reliable and precise optical field and reduce computing time. As micro-resonator of testing object, the phase-amplitude curve of micro-structure is derived. Experimental results indicate that the meas-urement precision of the presented algorithm is high, and measurement repeatability reaches 40 nm under the same experiment condition.Optical flow method is one of the most important methods of analyzing motion images. Optical flow field is used to analyze characteristics of motion objects. According to motion features of micro-electronic mechanical system （MEMS） micro-structure, the optical algorithm based on label field and neighborhood optimization is presented to analyze the in-plane micro-motion of micro-structure. Firstly, high speed motion states for each frequency segment of micro-structure in cyclic motion are frozen based on stroboscopic principle. Thus a series of dynamic images of micro-structure are obtained. Secondly, the presented optical algorithm is used to analyze the image sequences, and can obtain reliable and precise optical field and reduce computing time. As micro-resonator of testing object, the phase-amplitude curve of micro-structure is derived. Experimental results indicate that the measurement precision of the presented algorithm is high, and measurement repeatability reaches 40 nm under the same experiment condition.

关 键 词：micro-electronic mechanical system （MEMS） MICRO-MOTION stroboscopic imaging optical flow label field 

分 类 号：TP211.4[自动化与计算机技术—检测技术与自动化装置]