溶胶-凝胶工艺制备梯度折射率薄膜的研究  

Study On Gradient Index Film Prepared By Sol Gel Process

作　　者：刘泽[1] 李永祥[1] 吴冲若[1] 

机构地区：[1]东南大学电子工程系

出　　处：《电子器件》1998年第1期23-28,共6页Chinese Journal of Electron Devices

基　　金：国家自然科学基金

摘　　要：采用溶胶－凝胶工艺制备梯度折射率薄膜，薄膜中的折射率变化是由折射率调制元素在湿凝胶中的化学反应和扩散产生。本文详述了材料的制备过程，并对材料的结构和光学性能进行了研究。A gradient index film which is prepared on an glass substrate showed low reflectivity. The SiO 2 TiO 2 film was prepared by sol gel process and gradient index of the film was produced by a chemical treatment leaching process. The film showed low reflectivity in the visible wavelength regions. This low reflectivity is attributed to the gradient index of the film.

关 键 词：梯度折射率 溶胶-凝胶 薄膜 

分 类 号：TB43[一般工业技术] O484[理学—固体物理]