高温超导GdBa_2Cu_3O_(7-δ)薄膜测辐射热型红外探测器研究  

Investigation of High Tc Detector of GdBa2Cu3O7-δ Thin Film

作　　者：姚久胜[1,2] 王瑞兰[1,2] 宣毅[1,2] 李宏成[1,2] 樊江水 周燕[1,2] 万云 

机构地区：[1]中国科学院物理研究所国家超导实验室 [2]西北大学物理系

出　　处：《红外技术》1998年第3期1-8,共8页Infrared Technology

摘　　要：用高ＴｃＧｄＢａ２Ｃｕ３Ｏ７－δ薄膜设计并研制了单元及２×２阵列型红外探测器。其中２×２阵列型器件的四个单元探测器的Ｔｃ值及Ｒ－Ｔ特性相差≤３％。使用５００Ｋ黑体及Ｈｅ－Ｎｅ激光作为辐照源。单元及阵列器件最好的结果为噪声等效功率ＮＥＰ（５００，１０，１）分别为３．６×１０－１２和４．１×１０－１２Ｗ／Ｈｚ１／２，归一化探测率分别为１．６×１０１０和１．２×１０１０ｃｍＨｚ１／２／Ｗ；响应率分别为８．２×１０４和７．２×１０４Ｖ／Ｗ。The single and 2×2 arrays detectors were designed and fabricated with GdBa2Cu3o7δ thin films .The differences of the four detectors of the 2×2 array in Tc and RTcurves were less than 3%.Using the blackbody of 500K and HeNe laser, the typical results of the two kinds of detectors are as follows: the noise equivalent powerNEP(500,10,1) values are 3.6×10-12and 4.1×10-12W/Hz1/2,normalized detectivity　D 1.6×1010and 1.2×1010cmHz1/2/W;voltage responsivity Rv 8.2×104and 7.2×104V/W, respectively.

关 键 词：超导薄膜 红外探测器 高温超导材料 

分 类 号：TN215.04[电子电信—物理电子学] TM26[一般工业技术—材料科学与工程]