光学薄膜激光预处理能量密度选取  

Selecting Energy Density for Laser Preconditioning Optical Films

作　　者：夏志林[1] 赵元安[2] 黄才华[1] 邵建达[2] 薛亦渝[1] 杨芳芳[1] 郭培涛[1] 

机构地区：[1]武汉理工大学材料科学与工程学院,湖北武汉430070 [2]中国科学院上海光学精密机械研究所,上海201800

出　　处：《光学学报》2009年第2期560-565,共6页Acta Optica Sinica

基　　金：国家自然科学基金(10804090;60708004);武汉理工大学校自由探索基金(XJJ2007031);博士科研启动基金(471-38650322)资助课题

摘　　要：采用Nd:YAG三倍频激光对光学薄膜进行了预处理。实验发现三倍频激光预处理对薄膜的抗激光损伤能力有明显的影响,影响规律比较复杂,归纳得出合适激光预处理能量密度与测试激光能量密度有关。理论上借助杂质诱导薄膜损伤的概率统计模型,从激光预处理引起的激光微区退火以及形成微尺寸损伤两个主要方面着手,很好地解释了复杂的实验现象。总体上看,预处理激光能量密度低于激光退火所需临界能量密度时,预处理效果以负作用为主;预处理激光能量密度高于激光退火所需临界能量密度,且低于激光诱导薄膜微损伤所需临界能量密度时,预处理效果以改善薄膜抗激光损伤能力为主,预处理激光能量密度要尽量选在这个范围内;预处理激光能量密度高于激光诱导薄膜微损伤所需临界能量密度时,预处理效果同样以负作用为主。Frequency-tripled Nd： YAG laser was used to pre-treat optical film samples. The capacity of optical film＇s resisting laser induced damage is affected by laser preconditioning, but the influence regulations are very complicated. Results reflect that appropriate pre-treating laser energy density is related to testing laser energy density. From the aspects of laser annealing and laser induced slight damage in pre-conditioning, the probability statistical model of laser-induced damage deduced by the author can explain these complicated phenomena well. Generally, if the energy density of preconditioning laser pulse is below the critical energy density for laser annealing, the effect of laser precondition is negative mostly： when the energy density of preconditioning laser pulse is beyond the critical energy density for laser anneal and below that for laser induced micro-damage, the effect of laser precondition is positive mainly. It is appropriate to choose the preconditioning pulse energy density in this scope： while if the energy density of preconditioning laser pulse is beyond the critical energy density for laser induced microdamage, the effect of laser precondition is negative mainly.

关 键 词：光学薄膜 损伤概率 激光预处理 损伤阈值 

分 类 号：TN246[电子电信—物理电子学]