电子显微镜散斑照相技术  

Electron Microscope Speckle Photography Technique

作　　者：刘战伟[1] 吴宁宁[1] 谢惠民[2] 戴福隆[2] 

机构地区：[1]北京理工大学理学院力学系,北京100081 [2]清华大学航空航天学院力学系,北京100084

出　　处：《光子学报》2009年第1期64-68,共5页Acta Photonica Sinica

基　　金：国家基础研究基金(2004CB619304);国家自然科学基金(10602010,10472050和10625209)资助

摘　　要：提出了一种新颖的人工亚微米/纳米散斑制作技术.采用超声波分散亚微米/纳米颗粒,然后利用范德华力、静电力和毛细力将其吸附在试件表面.在特定分辨率的扫描电镜下,物体表面的亚微米/纳米颗粒可以看作是亚微米/纳米散斑.此外,发展了一种测量面内亚微米/纳米级变形的电子显微镜散斑照相技术.详细介绍了人工制作亚微米/纳米散斑和电子显微镜散斑照相技术。A novel artificial sub-micron or nanometer speckle fabricating technique was proposed by taking advantage of sub-micron or nanometer particles. In the technique, sub-micron or nanometer particles were adhered to an object surface by using ultrasonic dispersing technique. The particles on the object surface can be regarded as sub-micron or nanometer speckle by using a Scanning Electronic Microscope （SEM） at a special magnification. And,an Electron Microscope Speckle Photography （EMSP） method was developed to measure in-plane submicron or nanometer deformation of the object coated with the artificial sub-micron or nanometer speckles. The principle of artificial sub-micron or nanometer speckle fabricating technique and the EMSP method were discussed in detail. The experimental results verified that the artificial sub-micron or nanometer speckle fabricating technique and EMSP method is feasible.

关 键 词：实验力学 电子显微镜散斑照相技术 亚微米/纳米散斑 超声波分散技术 

分 类 号：O348.1[理学—固体力学]