激光束受限衍射对扫描系统分辨本领的影响  

Diffraction Effects of Laser Beam and Its Influences on Resolving Power of Scanning System

作　　者：高瑞[1] 郭福源[1] 李连煌[1] 彭玉家[1] 唐晓珊[1] 

机构地区：[1]福建师范大学激光与光电子技术研究所光子技术福建省重点实验室,福州350007

出　　处：《光子学报》2009年第1期199-203,共5页Acta Photonica Sinica

基　　金：福建省自然科学基金(A0540001);福建省科技厅F5类项目(2007F5040)资助

摘　　要：基于菲涅耳衍射积分公式推导出激光束经扫描元件衍射后场分布表达式,数值分析了激光束经扫描元件后衍射场振幅分布、激光束在扫描面上的光斑半径和激光扫描系统光学分辨本领的大小.结果表明,改变入射光束的束腰半径对激光扫描系统线分辨率、可分辨光点数和分辨容积产生不同的衍射影响.采用近似和拟合方法,分段给出不同衍射情况下激光扫描系统的线分辨率的函数表达式,并通过误差分析证明了近似和拟合函数表达式的精确性.Based on Fresnel diffraction integral formulation, the expression of diffractive field distribution for the laser beam passing through laser scanning components was derived. The amplitude distribution of diffractive field,the Spot radius on the scanning surface and the optical resolution of laser scanning system were analyzed numerically. The results show that the resolution parameters like line resolution,light spot number resolution and resolution capability of laser scanning system were altected by ttle change o~ waist radius of the incident beam. The sectional function expression of line resolution were given by the approximate and fittingmethod in different diffraction situation, and error analysis proves its accuracy.

关 键 词：菲涅耳衍射 线分辨率 可分辨光点数 分辨容量 

分 类 号：TN249[电子电信—物理电子学]