互不固溶系统的固态反应非晶化  

AMORPHIZATION IN THE IMMISCIBLE SYSTEMS BY SOLID STATE REACTION

作　　者：潘峰[1] 柳百新[1] 

机构地区：[1]清华大学,北京市100084

出　　处：《材料研究学报》1998年第3期311-313,共3页Chinese Journal of Materials Research

基　　金：国家自然科学基金!59231031

摘　　要：利用选区电子衍射和X射线衍射研究了互不固溶系统Cu－Ta和Cu－Nb纳米多层膜的固态　反应非晶化的可能性．结果表明：当单层厚度减小到一定程度，成分为25～30％Cu的多层膜可以通过退火实现固态反应非晶化，从而获得具有正混合热系统的非晶薄膜．在Cu－Ta系统中还获得了厚0．8μm的非晶态薄膜．互不固溶系统多层膜固态反应非晶化的热力学驱动力主要源于多层膜界面自由能.The possibility of amorphous phase formation by solid state reaction (SSR) in the immiscible Cu-Ta and Cu-Nb nano-multilayers was studied by means of selected area electron diffraction and X-ray diffraction. The experimental results revealed that, when the layer thickness was reduced down to a certain level. amorphization was achieved by SSR in the Ta-25～30% Cu and Nb-25～30%Cu films. The CuTa amorphous films with thickness of 0.8pm were also obtained by SSR.Thermodynamically the excess intedecial energy stored in multilayered films provided the driving force for the amorphization by SSR in the immiscible system.

关 键 词：多层膜 固态反应 非晶化 互不固溶系统 

分 类 号：O484.1[理学—固体物理]