非平衡定态相图新概念及其应用——激活低压金刚石气相生长热力学  

THERMODYNAMICS OF ACTIVATED LOW PRESSURE DIAMOND GROWTH FROM THE VAPOR PHASE

作　　者：王季陶[1] 

机构地区：[1]复旦大学电子工程系

出　　处：《物理》1998年第2期77-83,共7页Physics

基　　金：国家自然科学基金;国家863高技术资助项目

摘　　要：在激活的低压条件下，金刚石气相稳定生长的同时石墨会被腐蚀．这是近二三十年来国际上的一个热力学难题，甚至被认为是“热力学的悖论”．用非平衡热力学耦合理论可以给予很好的解释，并推导出非平衡定态相图的全新概念．在新型相图中金刚石在低压下是稳定相，而石墨被激活成为亚稳相．,,During continuous diamond growth under activated low pressure conditions spontaneous graphite etching takes place. This phenomena has been considered as a “thermodynamic paradox”. Nonequilibrium thermodynamic coupling theory provides an excellent explanation, and a new phase diagram concept of stationary non-equilibrium states has been derived. In this new type of phase diagram diamond becomes a stable phase, while graphite is activated into a metastable phase under low pressure. Theoretical results agree quantitatively with the experimental data reported in the literature.

关 键 词：热力学 相图 非平衡定态 金刚石 气相生长 激活 

分 类 号：O414.4[理学—理论物理] O613.71[理学—物理]