微小型红外光栅光谱仪光学系统的设计与优化  

Design and Optimization of Optical System of Miniature Infrared Grating Spectrometer

作　　者：杜晓晴[1,2] 童广[2] 胥庆[2] 赵釜[2] 

机构地区：[1]重庆大学光电技术及系统教育部重点实验室,重庆400030 [2]重庆大学微系统研究中心,重庆400030

出　　处：《应用基础与工程科学学报》2009年第1期85-91,共7页Journal of Basic Science and Engineering

基　　金：重庆市自然科学基金项目资助(CSTC-2006B2151)

摘　　要：光学系统是微小型光谱仪的核心部分,光学系统的设计质量将直接影响微小型光谱仪的性能.本文利用Zemax光学软件,对具有不对称Czerney-Turner结构的光栅光学系统进行设计与性能分析,并通过优化建立了满足要求的光学结构,该结构能实现波长范围为3—5μm的光谱检测,最小分辨波长间隔可小于50nm,光学系统特征尺寸小于10cm.本研究为微小型红外光谱仪的研制提供了前期理论基础与设计参考.Optical system is key core of miniature infrared spectrometer and the performance of instrument will be directly determined by optical structure and design level. A grating scanning optical system with asymmetry Czerney-Turner structure was adopted to form one miniature infrared spectrometer. Simulation and performance analysis of the optical system for the miniature infrared grating spectrometer was made by use of optical software Zemax and an optimum optical structure was built according to application requirement. The designed structure can realize spectral inspection in the range from 3 μm to 5 μm, and has less than 50nm of minimum resolving wavelength interval and less than 10cm of dimension of optical system. This work provides theoretic and design references for the development of miniature infrared spectrometer.

关 键 词：微小型红外光谱仪 光学系统设计 光谱分辨率 光栅 

分 类 号：TH133.21[机械工程—机械制造及自动化]