波带片离焦量和非单色光对光斑的影响  

Effect of Focusing Error and Illumination with Polychromatic Light on Zone Plate Light Spot

作　　者：杨绍光[1] 谢行恕[1] 赵永飞[1] 贾成芝[1] 

机构地区：[1]中国科学技术大学基础物理中心

出　　处：《光学学报》1998年第1期62-67,共6页Acta Optica Sinica

基　　金：合肥国家同步辐射实验室和国家自然科学基金

摘　　要：考虑了波带片在离焦和非单色光照明条件下的光斑特性。通过数值计算，得到了在不同离焦量时光强分布曲线、光斑大小、以及特定范围内总能量随离焦量的变化；同时得到不同带宽的光强分布曲线、光斑半径随带宽的变化曲线。并研究了用于软Ｘ光扫描显微镜的聚焦波带片允许的离焦误差以及光斑半径与带宽的关系。The property of light spot of zone plate in misfocusing conditions is considered. The effect of band width of illuminating light is discussed. Relative intensity distribution, radius of light spot and total energy in light spot have been calculated numericaly. Allowable limit of the largest focusing error of the zone plate which will be used in the softXray scanning microscope has been calculated. The limit of resolution of the soft Xray scanning microscope has been shown.

关 键 词：波带片 软X光 离焦量 光斑 显微镜 非单色光 

分 类 号：O435.2[机械工程—光学工程] TH742.63[理学—光学]