二元矩形软X射线衍射光栅的标量区衍射理论  

An Optical Design of 3-D Diffraction Grating in Soft X-Ray Spectra Based on Scalar Theory

作　　者：邵建达[1] 易葵[1] 袁利祥 王明利[1] 范正修[1] 王润文[1] 

机构地区：[1]中国科学院上海光学精密机械研究所光学薄膜中心

出　　处：《光学学报》1998年第1期99-102,共4页Acta Optica Sinica

基　　金：国家自然科学基金

摘　　要：利用标量区衍射理论分析了正交二元矩形软Ｘ射线衍射光栅的光学特性，给出了理论设计的初步结果。An asymptotic formalism used in the scalar domain is derived for studying the behavior of threedimension diffraction gratings used in small groove pitch and near normal incidence for soft X-ray. The theory is applied to study 3D lamellar gratings and results in a preliminary design.

关 键 词：衍射光栅 标量区 软X射线 正交二元光栅 

分 类 号：O434.19[机械工程—光学工程] O436.1[理学—光学]