外差干涉仪中偏振分光镜对测量精度的影响  

Influence of Polarized Beam Splitter on Measurement Precision in Heterodyne I nterferometry

作　　者：陈洪芳[1] 谭久彬[2] 钟志[3] 

机构地区：[1]北京工业大学机械工程与应用电子技术学院,北京100124 [2]哈尔滨工业大学超精密光电仪器工程研究所,黑龙江哈尔滨150001 [3]哈尔滨工程大学信息与通信工程学院,黑龙江哈尔滨150001

出　　处：《计量学报》2008年第B09期15-18,共4页Acta Metrologica Sinica

摘　　要：为了提高激光外差干涉的测量精度，必须明确偏振分光镜（PBS）对激光外差干涉测量精度的影响。基于激光外差干涉非线性误差产生机理，建立了PBS对非线性误差一次谐波和二次谐波的综合影响模型。理论分析表明，选用偏振透射率稍弱、偏振反射率强的PBS有利于减小非线性误差。在激光器出射的两激光束存在5°非正交误差情况下，当PBS的反射率理想时，透射率从1减小到0．90，非线性误差由4．41nm减小到4．19nm。同时，通过调整旋转角度可以补偿非线性误差一次谐波。在PBS存在5°旋转角度误差情况下，当PBS的反射率理想时，PBS的透射率从1减小为0．90，非线性误差一次谐波从4．41nm减小到2．56nm。To improve measurement precision in laser heterodyne interferometry, the influences of polarization beam splitter （PBS） upon nonlinearity must be detenninated. Based on the mechanism of nonlinearity, the model about how the first- harmonic and second - harmonic nonlinearities are affected by PBS is proposed. The simulation results show that the PBS which is of feeble transmissivity and strong reflectivity should be selected to reduce nonlinearity error. When nonorthogonal error of laser beams is 5°, and reflectivity of PBS is ideal, the transmissivity reduces from 1 to 0.90, nonlinearity reduces from 4.41 nm to 4.19 nm. The first harmonic nonlinearity is compensated by adjusting rotation angle of PBS. When rotation angle of PBS is 5°, and reflectivity of PBS is ideal, the transmissivity is reduced from 1 to 0.90, nonlinearity is reduced from 4.41 nm to 2.56 nm.

关 键 词：计量学 激光外差干涉 非线性误差 偏振分光镜 

分 类 号：TN247[电子电信—物理电子学]