一种基于高速A／D的刻线瞄准信号处理方法  

A Processing Method of Line Pointing Signal Based on High-speed A/D

作　　者：张晓[1,2] 叶孝佑[2] 孙双花[2] 高宏堂[2] 常海涛[2] 

机构地区：[1]中国计量学院计量测试工程学院,浙江杭州310018 [2]中国计量科学研究院,北京100013

出　　处：《计量学报》2008年第B09期31-35,共5页Acta Metrologica Sinica

摘　　要：介绍了基于高速A／D信号处理方法的系统组成和工作原理，包括对瞄准信号的模拟信号调理、A／D采样、数字信号处理等环节，能够实现2nm的瞄准分辨率，可用于激光干涉比长仪的动态显微瞄准系统。通过实验验证了方法的可行性，即使在干扰较大的非理想波形信号的情况下也能得到对刻线瞄准的较高的重复性。The structure and principle of the method based on high speed A/D is described, including the analog signals processing, MD sampling, digital signals processing of the pointing signal. It can achieve 2 nm aiming resolution and can be used for dynamic microscopic aiming systems of laser interferometer length comparator. The experiments verify the feasibility of the method and achieve high repeatability of the line pointing signal even if the waveform of line signal is more disturbed and not in ideal circumstance.

关 键 词：计量学 光电显微镜 MD转换 数据处理 瞄准精度 

分 类 号：TB92[一般工业技术—计量学]