高精度位移传感器动静态溯源和校准装置的研制  

Development of Traceability and Calibration Device for Static and Dynamic Characteristics of High Precision Displacement Sensors

作　　者：薛梓[1] 叶孝佑[1] 杨国梁[1] 王鹤岩[1] 

机构地区：[1]中国计量科学研究院,北京100013

出　　处：《计量学报》2008年第B09期57-60,共4页Acta Metrologica Sinica

基　　金：中国计量科学研究院院长基金（0506YS）

摘　　要：介绍了高精度位移传感器的动、静态特性溯源和校准原理及其标准装置的结构组成，并对它进行了实验验证。该装置可根据位移传感器在实际测量中的使用状态以及幅频响应范围，生成相应幅频下的标准动态信号并产生标准振动，经过同步采集及频谱分析，可得到在不同频率下相对激光基准的幅相误差。其生成的标准动态信号量值可直接溯源到激光波长，并可对位移传感器实现0～30μm下的任意间隔的线性校准和1—100Hz下的动态校准，它还可用于在线传感器的动静态特性的校准。In order to solve the problem of the static and dynamic characteristics traceability and calibration of high precision displacement sensors, a standard device is developed, and its structure, static and dynamic traceability and calibration method are introduced. Some experiments are conducted to verify the dynamic characteristic and function of the standard device. A wave gen- erator in the device can generate standard signals with various frequencies according to the frequency and amplitude ranges of high precision displacement sensors during the actual measurement. And the movement of PZT nanoautomation stage is driven according to the amplitude and frequency of the standard signal. Both signals output from the laser encoder and the PZT nanoautomation stage are synchronously sampled and analyzed using FFT method. The dynamic error of the device relative to the laser can be obtained. The values of the standard signals generated by the device can be traced to the laser wavelength. The device can be used to calibrate the linearity over the range of 0 - 30 μm of the displacement sensor and the dynamic characteristic under the frequencies 1 - 100 Hz, and it is also used to implement in- line calibration.

关 键 词：计量学 位移传感器 动态校准 溯源 动态响应特性 

分 类 号：TB97[一般工业技术—计量学]