2m比长仪测量滑板运动控制系统的实现  

The Measurement of Slide Motion Control System of 2 m Automatic Interference Length Comparator

作　　者：孙双花[1] 叶孝佑[1] 高宏堂[1] 常海涛[1] 张晓[2] 

机构地区：[1]中国计量科学研究院,北京100013 [2]中国计量学院计量测试工程学院,浙江杭州310018

出　　处：《计量学报》2008年第B09期122-126,共5页Acta Metrologica Sinica

摘　　要：分析了2m激光干涉比长仪测量滑板运动控制系统的实现方法。设计了气液联动控制机构，以气压为动力，利用气液转换器把气压转换为液压来推动活塞杆控制测量滑板的运行速度和方向，将气压控制的响应快与液压控制的速度稳定性高的特点结合起来，并结合电气系统的控制灵活性，构成了电-气-液的多级控制结构。利用多个液压回路管路直径长度的变化控制测量滑板移动的无级调速，实现了测量滑板运动方向、速度、位置的精确控制，测量速度为2μm/s～10mm/s。系统充分发挥了电、气、液的控制优点，速度，位置控制精度高、运动平稳、可靠性好。To study the driving system of the measuring slide of 2 m laser interference length comparator, a control system driven by air pressure is developed. It controls the piston moving velocity and direction by turning pneumatic pressure into hydraulic pressure using pneumatic-hydrauhc converter. It is constructed of electronic, pneumatic and hydraulic multistage control structure which combined the fast response of pneumatic control, the motion stability of hydraulic control and the flexibility of electronic control. It realizes continuously variable transmission for measuring the shde movement by multibarrel hydraulic loop with different diameters. It is capable of precise control for direction, position and velocity from 2 μm/s to 10 mm/s. The system takes full advantage of the excellent feature of electronic control, pneumatic control and hydraulic control. It is of high accurate velocity and position control, stable and reliable motion.

关 键 词：计量学 干涉比长仪 测量滑板 电气液控制系统 无级调速 

分 类 号：TB92[一般工业技术—计量学]