实时测量308nm激光对薄膜的损伤阈值  

MONITORING AND MEASUREMENT OF DAMAGE HRESHOLD ON HR AND AR COATINGS FOR THE 308nm EXCIMER LASER

作　　者：高鸿奕[1] 楼祺洪[1] 董景星[1] 丁爱臻[1] 

机构地区：[1]中国科学院上海光机所

出　　处：《强激光与粒子束》1998年第1期123-126,共4页High Power Laser and Particle Beams

基　　金：国家863激光技术领域资助

摘　　要：用散射光法，建立了一套实时监视与测量３０８ｎｍ激光对全反膜和增透膜的损伤的实验装置。实时观察到了损伤从起始、加深直至饱和的整个过程的波形。用这一装置测量了全反膜和增透膜在３０８ｎｍ激光作用下的损伤阈值。测得全反膜在０°与４５°入射角时的损伤阈值分别为１．７与１．０Ｊ／ｃｍ２。而增透膜的阈值为１．３Ｊ／ｃｍ２。A set of instrument has been built up by means of the combination of a schlieren with a one dimention array of ultraviolet opticelectrical diode and a simultaneously triggered oscilloscope,which is use in monitoring and measurement the damage state and the threshold on the high reflection(HR) and the anti reflection(AR) coatings under the irradiation of the 308nm excimer laser.By this instrument,the waveforms of the whole damage process which contained the initial,the deepening and the saturated sestages of the damage,have been investigated.The measured damage threshold is about 1 7J/cm 2 at zero incident angle and 1 0J/cm 2 at 45° incident angle for the HR coating, and 1 29J/cm 2 for the AR coating.And also some analysis about the experiment result has been given damage.

关 键 词：激光损伤 薄膜 损伤阈值 实时测量 光学元件 

分 类 号：TH74[机械工程—光学工程] TN249[机械工程—仪器科学与技术]