不同衬底温度下Tb/Fe/Dy纳米多层膜超磁致伸缩性能研究  

Giant magnetostrictive effect in Tb/Fe/Dy nano-multilayer films under different deposition temperatures

作　　者：李晓东[1] 黄素梅[1] 潘丽坤[1] 陈奕卫[1] 杨燮龙[1] 孙卓[1] 

机构地区：[1]华东师范大学物理系,纳光电集成与先进装备教育部工程研究中心,上海200062

出　　处：《华东师范大学学报（自然科学版）》2008年第5期98-103,共6页Journal of East China Normal University(Natural Science)

基　　金：国家自然科学基金(60477003，10774046)

摘　　要：采用多靶磁控溅射仪在室温和衬底温度为300℃的条件下制备Tb/Fe/Dy纳米多层膜,研究其磁性能和超磁致伸缩性能.结果表明该纳米多层膜较TbDyFe单层膜有更明显的垂直磁各向异性和更大的矫顽力.尽管纳米多层膜样品具有垂直各向异性,但仍具有超磁致伸缩性能.特别是衬底温度为300℃的纳米多层膜样品。具有Laves相结构的TbDyFe纳米晶体析出,使得低磁场下磁致伸缩性能有了显著的提高.Tb/Fe/Dy nano-multilayer films were deposited by multi-targets magnetron sputte- ring system at room temperature and substrate temperature of 300℃. The nano-multilayer films have large perpendicular anisotropy and high coercive force than the TbDyFe single layer film, and show giant magnetostrictive effect though they have perpendicular anisotropy. The nano- multilayer film deposited by substrate temperature of 300℃ has enhanced low field giant magnetostrictive effect because the nano-crystaltine of TbDyFe with Laves phase structure segregates from the amorphous matrix.

关 键 词：Tb/Fe/Dy 纳米多层膜 超磁致伸缩效应 垂直各向异性 

分 类 号：TM271[一般工业技术—材料科学与工程]