能动变形反射镜波面误差特性分析及实验研究  

Analysis on Wavefront Errors of Active Deformable Mirror

作　　者：杨李成[1] 凌宁[1] 

机构地区：[1]中国科学院光电技术研究所,四川成都610209

出　　处：《光学学报》2009年第3期569-574,共6页Acta Optica Sinica

摘　　要：对能动变形反射镜波面误差进行了理论分析和实验研究。在对能动变形反射镜波面误差进行理论分析和实验研究的基础上,利用有限元对37单元能动变形反射镜低频象差补偿能力进行了相关的分析和计算,结合相关实验确定了能动变形反射镜的主要参数,成功研制出了曲率半径1926mm、口径300mm的37单元球面能动变形反射镜。经实验测定校正误差前、后镜面面形的PV值(波前峰谷差值)和RMS值分别为:0.545λ、0.081λ及0.239λ、0.031λ,从实测结果可以看到取得了明显的校正效果。并且在研制过程中对镜面加工、驱动器极头粘接等技术和工艺问题进行了有效地探索和研究,从而为能动变形反射镜进一步的研制工作奠定了良好的基础。Wavefront errors of the active deformable mirror are analyzed and experimentally studied. Based on the theoretical and experimental wavefront errors of the active deformable mirror, with key parameters gotten by the finite element method about compensating capabilities of the low-frequency errors for 300 mm aperture and 1926 mm radius of curvature,37-element spherical active deformable mirror, has been fabricated. The peak-valley value and root-mean-square are 0. 545λ （λ, warelength） and 0. 081λ before correction, while 0. 239λ and 0. 031λ are achieved after correction in experiments. The techniques and craftubrk, such as mirror surface machning and actuator tip cementation, were explored.

关 键 词：能动变形反射镜(ADM) 有限元法 影响函数 误差分析 

分 类 号：TN247[电子电信—物理电子学]