硅基微光学谐振式陀螺瑞利背向散射噪声分析  

Analysis of Rayleigh Backscattering Noise in Micro-Optical Resonance Gyroscope

作　　者：于怀勇[1] 张春熹[1,2] 冯丽爽[1,2] 洪灵菲[1] 邢济武[1] 

机构地区：[1]北京航空航天大学光电技术研究所,北京100191 [2]精密光机电一体化教育部重点实验室,北京100191

出　　处：《光学学报》2009年第3期799-804,共6页Acta Optica Sinica

摘　　要：阐述了硅基微光学陀螺(MORG)结构中瑞利背向散射噪声的产生机理,并创建了硅基微光学陀螺光路的静态与动态理论模型,公式化地描述了硅基二氧化硅谐振腔中的该噪声特性,并通过软件算法仿真综合分析了硅基微光学谐振式陀螺中瑞利背向散射噪声与主信号强度之间的关系,以及其与反向光信号的干涉信号对主信号的影响。分析了瑞利背向散射噪声信号对谐振腔性能的影响,定量分析了此噪声对谐振腔清晰度、陀螺极限灵敏度的影响。提出了抑制系统中该噪声的方案,并搭建实验装置,利用提出的解决方案对系统进行了优化,实验验证了理论分析的结果。The theory of Rayleigh backscattering noise in the silicon substrate micro-optical resonance gyro （MORG） is described, and the static-and dynamic-state models of MORG are constructed. Characteristics of this noise in the resonator of SiO2 on Si substrate are formulized. The relationship between the Rayleigh backscattering noise and main signal intensity, and the effect on the main signal by the interference signal of the noise and reverse optical signal, are simulated by software algorithm. Effect of this noise on the performance of the resonator, such as the definition and the maximal sensitivity, is analyzed. The scheme to suppress the noise is proposed. Based on the anslysis, the experimental system is set up. The results agree well with theoretic calculation.

关 键 词：集成光学 硅基微光学陀螺 噪声分析 谐振腔 瑞利背向散射 

分 类 号：V241.59[航空宇航科学与技术—飞行器设计]