微波氢气等离子体介电特性的研究  

Study on the Dielectric Characteristic of Microwave Hydrogen Plasma

作　　者：沈长圣[1] 杨鸿生[1] 龚克[2] 孙永志[1] 

机构地区：[1]东南大学电子科学与工程学院毫米波国家重点实验室,南京210096 [2]信阳师范学院物理电子工程学院,信阳464000

出　　处：《微波学报》2009年第1期26-29,共4页Journal of Microwaves

基　　金：江苏省“十.五”科技攻关项目(BE2001034)

摘　　要：通过实验发现微波矩形波导谐振腔中氢气等离子体生成前后谐振腔的谐振频率发生了变化。根据实验测量和HFSS软件仿真计算出了等离子体的等效相对介电常数,并研究了压强对介电特性的影响。由仿真结果可知:氢气和氢气等离子体的相对介电常数明显不同,微波氢气等离子体的等效相对介电常数小于1。在一定的压强范围内,微波氢气等离子体的等效相对介电常数随着等离子体压强的变化而变化。Experiments showed that the resonant frequency of the microwave rectangular waveguide resonator changed when the discharged hydrogen became plasma. Based on the experimental measurements and the High Frequency Structure Simulation （HFSS） , the effective relative dielectric constant of the plasma was obtained. The effect of plasma pressure on the dielectric constant of the hydrogen plasma was also studied. The results showed that the relative dielectric constant of hydrogen plasma was different from that of hydrogen. The effective relative dielectric constant of microwave hydrogen plasma is less than 1. The relative dielectric constant of hydrogen plasma changes when the plasma pressure changes under a certain scope.

关 键 词：等离子体 氢气 谐振腔 相对介电常数 

分 类 号：O53[理学—等离子体物理]