金属氧化物气体传感器检测混合气体组分浓度的线性方法与原理  

Principles and Means of Composing Concentration Detection of Mixture Gases with Metal Oxide Gas Sensors

作　　者：张正勇[1,2,3] 徐定钧[1,4,2,3] 于震[1,4,2,3] 

机构地区：[1]中国科学院合肥智能机械研究所,合肥230031 [2]安徽省仿生感知与先进机器人技术重点实验室,合肥230031 [3]传感技术联合国家重点实验室,合肥230031 [4]中国科学技术大学信息科学技术学院自动化系,合肥230027

出　　处：《传感技术学报》2009年第2期179-182,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金重点项目"煤矿瓦斯传感技术和预警系统的基础理论及关键技术研究"资助(50534050);国家863计划课题"矿井瓦斯传感器及监测预警装置的研究"资助(2007AA04Z332)

摘　　要：金属氧化物气体传感器的交叉敏感特性给混合气体各组分浓度的定量检测带来了困难。基于传感器的灵敏度与被测气体浓度呈对数线性关系,同一传感器对不同被测气体具有不同的灵敏度,不同传感器对同一气体具有不同的敏感特性,描述了采用多个传感器检测混合气体各组分浓度的线性原理与方法,并介绍了识别未知多组分混合气体中某一组分浓度的方法。分析结果表明,在传感器有效测试浓度范围内,有n种组分的混合气体各组分的浓度的对数等于n×n的指数矩阵乘以n×1的指前系数与传感器的输出的函数的对数矩阵。实验结果显示,对混合气体各组分浓度检测的相对误差小于7%。It＇s difficult to detect composing concentration of gases mixture with metal oxide gas sensor because of cross responses of various gases. Based on the typical sensitivity characteristic, i.e. sensitivity depend on gas concentration submitting logarithmic linear property, same type of metal oxide gas sensor has different sensitivity characteristic for different gases, and different type of metal oxide gas sensor has different sensitivity characteristic for same gas. The principles and means of linear formula for detection of composing concentration of mixture gases using various metal oxide gas sensors has been presented, and introduced measurement of single gas concentration of unknown mixture gases. Result shows that logarithm of composing concentration of mixture gases is equal multiply nXn exponent matrix by n×1 function matrix of output of sensors array and coefficient in the concentration range of sensor effective measurement. Experiment shows the detect error of composing concentration of mixture gases less than 7% .

关 键 词：混合气体检测 金属氧化物 敏感特性 多传感器 指数矩阵 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]