旋转法下降炉的智能控制  

Intelligent Control of Crystal Furnace with Rotational Bridgeman Growth

作　　者：姚婕[1] 雷小博[1] 王建春[1] 

机构地区：[1]西安理工大学,陕西西安710048

出　　处：《电子工业专用设备》2009年第2期24-27,共4页Equipment for Electronic Products Manufacturing

摘　　要：随着我国人工晶体材料工业的飞速发展,急需性能优良、稳定性好、自动化程度高的晶体生长设备。提出了炉室上升坩埚旋转技术,不仅利于提高生长晶体的品质,而且生长设备简单,易于实现自动化控制。采用性能优良的ADμC812微控制芯片进行控制,是晶体生长设备控制方法的有益探索。该设备自动化程度较高,速度运行可靠,维护简单方便,具有推广价值。With the rapid development of man-made crystal industry, there is increasing demand for crystal growth equipment of good performance, fine stability and high automatization. Furnace ascent and crucible rotation technique are presented, which benefit not only crystal quality but also equipment simplicity and automatic control. Tiny control chip ADuC812 is used successfully, which is an useful exploration to control method of crystal growth equipment. The equipment has the characteristic of high automatization, reliable velocity, handy maintenance.

关 键 词：下降法 晶体生长炉 坩埚加速旋转技术 控制 ADΜC812 

分 类 号：TF806.9[冶金工程—有色金属冶金]