氟化钠吸附氟化氢最佳工艺参数测定  

Optimal Technics Parameter Measurement of Sodium Fluoride Adsorbing Hydrogen Fluoride

作　　者：柳彤[1] 王少波[1] 董露荣[1] 

机构地区：[1]中国船舶重工集团公司第七一八研究所

出　　处：《舰船防化》2009年第1期12-17,共6页

摘　　要：氟化钠（NaP）是一种很好的吸附剂，有着吸附氟化氢（HF）的特性，在电子气体的生产中经常被用来吸附HF，在含氟电子气体的纯化工艺中有着极为重要的应用。本文通过正交实验测定氟化钠在不同的吸附条件下吸附氟化氢杂质的吸附效果，并对实验结果进行方差分析，并评价了各因素对吸附效果的影响。实验表明：NaF对HF有很好的吸附能力，在最佳的操作条件下，几乎可实现完全吸附；适合的吸附温度为20℃-80℃；吸附率随气体流量的增大而降低；压力对吸附率的影响不明显．Sodium fluoride has a far-ranging application in electronic gas production as adsorbent to wipe off hydrogen fluoride. It has also an important application in purification technique of electronic gas with fluorine. This paper expatiates the adsorbent capability in different conditions of sodium fluoride and gets the best adsorbing conditions by analyzing the adsorbing affection of hydrogen fluoride under different adsorbing conditions of sodium fluoride. The experiment indicates that sodium fluoride possesses nice adsorbent capability to hydrogen fluoride, which can adsorb hydrogen fluoride completely in best running-conditions. We get some useful conclusions by the experiment as follows： The best adsorbent temperature is （20 to 80） centigrade; the adsorbent capability of sodium fluoride decreases when the flux of gas increases; pressure has no obvious influence to the adsorbing affection.

关 键 词：氟化钠 氟化氢 吸附 

分 类 号：TG115.339[金属学及工艺—物理冶金]