溶胶-凝胶法制备WO_3-SiO_2材料的氨敏特性研究  

Study on NH3 Sensing Properties of WO3SiO2 Materials Prepared by Solgel Method

作　　者：王旭升[1,2] 张良莹[1,2] 姚熹[1,2] 岛之江宪刚 酒井刚 三浦则雄[1,2] 山添升[1,2] 

机构地区：[1]西安交通大学电子材料研究室 [2]日本九州大学研究生院材料科学与工程系

出　　处：《功能材料》1998年第3期276-280,共5页Journal of Functional Materials

摘　　要：采用溶胶－凝胶法制备了ＷＯ３＋ｘｗｔ％ＳｉＯ２（ｘ＝０，５，１０，２０）粉体材料。对其结构、形貌进行了ＸＲＤ、ＡＦＭ、ＸＰＳ和比表面积测量、分析，结果表明：获得了单斜晶系结构的ＷＯ３多晶材料；晶粒尺寸随ＳｉＯ２含量的增加而减小。测量了材料的ＮＨ３气敏特性，得到敏感元件的电阻和灵敏度随ＳｉＯ２含量的增加而增加；溶胶－凝胶法制备的ＷＯ３＋５ｗｔ％ＳｉＯ２粉料用于ＮＨ３测量具有优良的特性，在３５０℃及以上应用优于纯ＷＯ３材料。Gas sensing materials of WO3+xwt%SiO2 (x=0,5,10,20) were prepared by means of solgel method. The microstructure was characterized through XRD, AFM, XPS and surface area analyzer. It was observed that the nanosized monoclinic phase of WO3 was formed and the grain size decreased with increasing amount of SiO2. The materials' NH3 sensing properties were measured in the conventional flow apparatus. Being superior to pure WO3 element the WO3+5wt%SiO2 sensing element gave fairly good response to NH3 above 350℃.

关 键 词：半导体 气敏材料 溶胶-凝胶法 三氧化钨 二氧化硅 

分 类 号：TN304.21[电子电信—物理电子学]