基于虚拟仪器的微机电系统动态特性测试仪设计  

Design of spectrum analyzer based on visual instrument technique

作　　者：王嫘[1] 董景新[1] 赵长德[1] 李童杰[1] 孔星炜[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《中国惯性技术学报》2009年第1期81-84,共4页Journal of Chinese Inertial Technology

基　　金：国家十一五预研基金资助项目(51308050208)

摘　　要：设计了一种基于虚拟仪器的微机电系统动态特性测试仪,主要用于微机电系统的频谱测试和静态特性测试。该仪器采用PCI总线24位高性能数据采集卡,使用虚拟仪器技术进行设计和开发,采用扫频方法给待测系统输入一系列由低频到高频的正弦激励信号,进而分析出该系统响应和激励之间的关系。其频率范围为0.01Hz～10kHz,并能在关键频率附近增加测试的频率点以提高精度。试验表明,该仪器的最大幅值误差小于0.2dB,最大相位误差小于0.7°,同时具有较高的可靠性和扩展性。该仪器自动化程度高,并具有良好的人机交互特性,可实时显示测试数据并绘制曲线,并在测试完成后进行数据分析处理,最后自动生成报表。A spectrum analyzer based on Visual Instrument （VI） technique was designed, which could be used to analyze the static and dynamic characteristics of the MEMS（Micro-Electro-Mechanism System）. A 24-bit data card with PCI bus is used in this analyzer. Frequency method is applied to get the dynamic characteristics of the system under test, and the frequency range is from 0.01 Hz to 20 kHz. This analyzer extends the testing range of low frequency, and adds more testing points in the main frequency. The calibration results in the lab show that the maximum amplitude error and maximum phase error of this instrument is lower than 0.2 dB and 0.7° respectively. The analyzer is of high automation level and has a friendly interface. It can analyze and process the online data, build the graphs and then generate its report.

关 键 词：频谱分析 虚拟仪器 数据采集 LABVIEW 

分 类 号：U666.1[交通运输工程—船舶及航道工程]