有机波导制备工艺对乐甫波传感器性能的影响  

Effect of organic guiding layer preparation technique on properties of love wave sensor

作　　者：胡佳[1] 杜晓松[1] 杨邦朝[1] 谢光忠[1] 应智花[1] 蒋亚东[1] 王涛[1] 袁凯[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《功能材料》2009年第3期427-428,435,共3页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(60736005);博士点基金资助项目(20070614047)

摘　　要：研究了基于PMMA波导的乐甫波传感器,研究了器件的插损以及质量灵敏度随波导层厚度变化的关系。采用低浓度、低粘度的前驱溶液,多步旋涂工艺制备了PMMA波导薄膜,降低了器件的插损,实现了2.18μm的'有效厚度',器件的质量灵敏度达705cm2/g,与前人相比提高了1倍。The SiNO film has been deposited by unbalance magnetron sputttering（UP, MS） on the substrate of Ti6A14V alloy at different N2 gas flow rate. The wear-resistance and anticorrosion properties were studied. The results show that the samples coating with SiNO film have perfect wear-resistance and anticorrosion properties. It is suggested that the N atom content and the compound exist statement significantly affects the properties of the SiNO films.

关 键 词：乐甫波传感器 PMMA波导 插损 质量灵敏度 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]