Synthesis of organic semiconductor hexadecachloro zinc phthalocyanine and its gas sensitivity  

作　　者：施云波 雷廷平 李赞 修德斌 赵文杰 冯侨华 王立权 

机构地区：[1]Mechanical Engineering Center for Post-doctoral Studies,Harbin Engineering University [2]School of Measurement Control Tech & Communications Engineering,Harbin University of Science and Technology [3]School of Applied Sciences,Harbin University of Science and Technology [4]School of Life Science and Chemistry,Harbin University

出　　处：《Journal of Semiconductors》2009年第3期78-82,共5页半导体学报（英文版）

基　　金：supported by the National Natural Science Foundation of China (No. 60772019);the National High Technology Research andDevelopment program of China (No. 2006AA040101-05);the National Science Foundation for Post-Doctoral Scientists of China (No.20080440839).

摘　　要：Due to the difficulty in synthesizing perhalogenated metallophthalocyanine, the method of ammonium molybdate solid phase catalysis was introduced, and by using tetrachlorophthalic anhydride and urea as the raw materials, hexadecachloro zinc phthalocyanine （ZnPcCl16） was synthesized. Components of the composite were analyzed by energy spectrum, and its functional group structures and absorption peaks were characterized by IR and UV-vis spectroscopy. The thin films of gas sensors were prepared in a vacuum evaporation system and evaporated onto SiO2 substrates, where sensing electrodes were made by MEMS micromachining. The optimal conditions for the films are： substrate temperature of 150 ℃ evaporation current of 95 A and film thickness of 50 nm. The result showed that the sensors were ideally sensitive to Cl2 gas and could detect the minimum concentration of 0.3 ppm.Due to the difficulty in synthesizing perhalogenated metallophthalocyanine, the method of ammonium molybdate solid phase catalysis was introduced, and by using tetrachlorophthalic anhydride and urea as the raw materials, hexadecachloro zinc phthalocyanine （ZnPcCl16） was synthesized. Components of the composite were analyzed by energy spectrum, and its functional group structures and absorption peaks were characterized by IR and UV-vis spectroscopy. The thin films of gas sensors were prepared in a vacuum evaporation system and evaporated onto SiO2 substrates, where sensing electrodes were made by MEMS micromachining. The optimal conditions for the films are： substrate temperature of 150 ℃ evaporation current of 95 A and film thickness of 50 nm. The result showed that the sensors were ideally sensitive to Cl2 gas and could detect the minimum concentration of 0.3 ppm.

关 键 词：hexadecachloro zinc phthalocyanine organic semiconductor gas sensitivity 

分 类 号：TN304[电子电信—物理电子学]