载流子输运和寄生参数对隧道再生双有源区垂直腔面发射激光器调制特性的影响  

Study on the effects of carrier transport and parasitic parameters on the modulation response of tunnel regenerated vertical-cavity surface-emitting lasers with double active regions

作　　者：王同喜[1] 关宝璐[1] 郭霞[1] 沈光地[1] 

机构地区：[1]北京工业大学,北京市光电子技术实验室,北京100124

出　　处：《物理学报》2009年第3期1694-1699,共6页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:60506012);国家重点基础研究发展计划(973)项目(批准号:2006CB604902);霍英东基金(批准号:101062);国家高技术研究发展计划(批准号:2006AA03A121);教育部新世纪优秀人才计划项目(批准号:39002013200801);北京市青年骨干教师培养计划项目(批准号:J2002013200801);北京工业大学研究生科技基金(批准号:ykj20071594)资助的课题~~

摘　　要：建立了一种适用于多量子阱和多有源区的多层速率方程模型.通过小信号分析,得到了光子密度、载流子俘获、逃逸和隧穿时间等关键参数对单有源区和隧道再生双有源区垂直腔面发射激光器频率响应特性的影响,并分析了在相同驱动电流下隧道再生双有源区器件调制带宽大于单有源区器件的原因.进一步研究了隧道再生双有源区内腔接触氧化限制型垂直腔面发射激光器的寄生电参数及其寄生电路,对其频率响应进行了模拟分析.A rate equation model of multi-quantum wells and multi-active regions were presented. The effects of photon density and the carrier capture-escape-tunnel time on the frequency response of single active region vertical-cavity surface-emitting Laser （VCSEL） and tunnel-regenerated VCSEL with two active regions were simulated by the small signal analysis. The result of simulation shows that the modulate bandwidth of tunnel-regenerated VCSEL with two active regions is larger than that with single active region under the same drive current,then its causes are discussed. Moreover,we simulate the frequency response of the parasitic circuit of tunnel-regenerated internal-contact oxide-confined VCSEL with two active regions after analyzing its parasitic parameters.

关 键 词：垂直腔面发射激光器 速率方程 调制特性 隧道再生 

分 类 号：TN248[电子电信—物理电子学]