划痕法综合评定膜基结合力  

Measurement of TiN Film Substrate Interfacial Adhesion by Scratching

作　　者：瞿全炎[1,2] 邱万奇[1] 曾德长[1] 刘正义[1] 

机构地区：[1]华南理工大学材料科学与工程学院、金属材料科学与工程系,广州510640 [2]广东省特种设备检测院,广州510655

出　　处：《真空科学与技术学报》2009年第2期184-187,共4页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金广东省联合基金重点项目(No.U0734001);国家自然科基金(No.50874050);广东省科技计划(No.2007B010600043,2006A11002001,No.2007B010600007);广州市科技计划(No.2006Z2-D0131,No.2006B2-D0121与No.2006Z3-D0281)的资助

摘　　要：用划痕实验探索了综合表征膜基结合力的方法。在瑞士CSM仪器的微划痕测试仪(Micro-Scratch Tester,MST划痕仪)对真空多弧离子镀设备制备的WC-Co/TiN膜基结合力进行划痕实验,系统地介绍了如何利用MST划痕仪所测的声发射数据、摩擦力数据及光学、电子扫描划痕形貌来综合评定膜基结合力,并用WS-92划痕仪对评定结果进行验证。评定结果表明,单一的声发射图谱或摩擦力曲线不能准确判定膜基结合力的表征值临界载荷,声发射图谱、摩擦力曲线与划痕形貌综合评定临界载荷结果才可信。WS-92划痕仪测量的结果验证了MST划痕仪评定结果的准确性。The TiN films were deposited by vacuum multi-are ion plating on WC-Co substrate. The scratch tracks made with a micro-scratch tester（MST） were characterized with an optical microscope and scanning electron microscope （SEM）. The adhesion at the interface of the TiN films and the substrate were then evaluated by calculating the acoustic emission and frictional force data obtained with the MST, and the optical images and SEM micrographs of the scratches. The results show that neither acoustic emission spectra nor friction force curve can exclusively determine the adhesion strength;the critical load and the interfacial adhesion can only be precisely evaluated by combining the acoustic emission spectra, the friction force curve and the Scratch truck morphologies. The measured result with the MST agrees well with that obtained with WS-92 scratch tester.

关 键 词：划痕试验 结合力 综合评定 WC—Co/TiN 

分 类 号：TB34[一般工业技术—材料科学与工程]