共焦扫描系统的光外差探测  

Optical Heterodyne Detection of Confocal Scanning System

作　　者：魏高尚[1] 张平[1] 吴震[1] 向际鹰[1] 

机构地区：[1]华中理工大学光电子工程系

出　　处：《华中理工大学学报》1998年第3期92-93,107,共3页Journal of Huazhong University of Science and Technology

基　　金：国家自然科学基金

摘　　要：提出了一套新颖扫描成像系统方案，它综合了共焦扫描方式与光外差探测方法的优点．该系统具有μｍ级的纵向层析分辨率能力，且能大大改善对低反射试样或较厚试样的深层扫描成像的图像质量．对其成像机理、光学特性进行了分析．A novel approach to the imaging system by scanning with the advantages of both the confocal scanning mode and the optical heterodyne detection method are scanned. It possesses the ability of micron level of resolution for longitudinal chromatographical analysis and at the same time greatly improves the image quality when the low reflective samples or the inner sections of thick objects are scanned. The imaging mechanism and the optical properties versus the conventional confocal scanning system are discussed.

关 键 词：共焦扫描系统 扫描 显微 光外差探测 

分 类 号：TH742[机械工程—光学工程]