压电工作台快速动态定位建模及其控制器设计  

Modeling and Controller Design of Piezopositioning Stage for High Speed Dynamic Positioning

作　　者：张栋[1] 张承进[1] 魏强[1,2] 

机构地区：[1]山东大学,济南250061 [2]泰山学院,泰安271021

出　　处：《中国机械工程》2009年第6期673-677,682,共6页China Mechanical Engineering

基　　金：山东省科技发展计划资助项目(2007GG30D04D02)

摘　　要：为实现压电工作台快速准确动态定位,建立了其动态定位模型并设计了控制器。通过理论分析提出了能够同时体现压电工作台动态特性和迟滞特性的动态迟滞模型结构方程,并研究了其参数辨识途径,进而给出了采用Prandtl-Ishlinskii(PI)迟滞算子的动态迟滞模型,基于该模型设计了逆模型开环控制器。以扫描电化学显微镜的三维压电工作台为实验对象,阐述了动态迟滞模型的具体建模过程,同时对其开环控制器进行了硬件在回路仿真研究。快速动态定位实验表明,动态迟滞模型的平均误差为0.11μm,逆模型开环控制平均跟踪误差为0.12μm,基本满足压电工作台快速准确动态定位的要求。In order to realize piezopositioning stage＇s dynamic positioning with high speed and high accuracy, dynamic positioning modeling and the controller design were studied. Through theoretical analysis the dynamic hysteresis model structure of piezopositioning stage and its parameter identification way were proposed. Furthermore, the dynamic hysteresis model composed of Prandtl-Ishlinskii （PI） hysteresis operator was given and an open loop controller was designed. Some experiments on the piezopositioning stage of a scanning electrochemistry microscope elaborated the building process of the dynamic hsyteresis model, then the hardware-in-the-loop simulation of the open loop controller was made. Experimental results indicate that the mean error of dynamic hysteresis model is 0.11μm and the mean tracking error of the open loop controller is 0. 12μm, which satisfies the high accuracy requirements when the stage positioning at high speed.

关 键 词：压电工作台 动态定位 动态迟滞模型 PI迟滞模型 

分 类 号：TH742[机械工程—光学工程] TN384[机械工程—仪器科学与技术]