Ultra-thin a-SiN_x protective overcoats for hard disks and read/write heads  

作　　者：丁万昱 徐军 陆文琪 邓新绿 董闯 

机构地区：[1]State Key Laboratory of Material Modification by Laser, Ion and Electron Beams, Dalian University of Technology [2]Institute of Optoelectronic Materials and Device, School of Materials Science and Engineering, Dalian Jiaotong University

出　　处：《Chinese Physics B》2009年第4期1570-1573,共4页中国物理B（英文版）

基　　金：Project supported by the Major Program of the National Natural Science Foundation of China (Grant No 50390060);the National Natural Science Foundation of China (Grant Nos 60576022 and 50572012)

摘　　要：This paper reports that amorphous silicon nitride （a-SiNx） overcoats were deposited at room temperature by microwave ECR plasma enhanced unbalanced magnetron sputtering. The 2 nm a-SiNs overcoat has better anti-corrosion properties than that of reference a-CNx overcoats （2 4.5 nm）. The superior anti-corrosion performance is attributed to its stoichiometric bond structure, where 94.8% Si atoms form Si-N asymmetric stretching vibration bonds. The N/Si ratio is 1.33 as in the stoichiometry of Si3N4 and corresponds to the highest hardness of 25.0 GPa. The surface is atomically smooth with RMS 〈 0.2 nm. The ultra-thin a-SiNx overcoats are promising for hard disks and read/write heads protective coatings.This paper reports that amorphous silicon nitride （a-SiNx） overcoats were deposited at room temperature by microwave ECR plasma enhanced unbalanced magnetron sputtering. The 2 nm a-SiNs overcoat has better anti-corrosion properties than that of reference a-CNx overcoats （2 4.5 nm）. The superior anti-corrosion performance is attributed to its stoichiometric bond structure, where 94.8% Si atoms form Si-N asymmetric stretching vibration bonds. The N/Si ratio is 1.33 as in the stoichiometry of Si3N4 and corresponds to the highest hardness of 25.0 GPa. The surface is atomically smooth with RMS 〈 0.2 nm. The ultra-thin a-SiNx overcoats are promising for hard disks and read/write heads protective coatings.

关 键 词：hard disk overcoat ULTRA-THIN a-SiNx plasma enhanced magnetron sputtering 

分 类 号：TP333.35[自动化与计算机技术—计算机系统结构]