膜片式盲小孔测头的设计与研究  

A Study on a Diaphragmatic Probe for Measuring Blind Small Holes

作　　者：杨世民[1,2] 李书和[1,2] 韩梅妹 张国雄[1,2] 

机构地区：[1]天津大学精密仪器与光电子工程学院 [2]天津理工学院电子系

出　　处：《计量学报》1998年第2期142-146,共5页Acta Metrologica Sinica

摘　　要：提出了一种弹性尺寸传递理论，并依此理论研制了膜片式盲小孔测头，以膜片为敏感元件，把测杆视为弹性体。该测头可用于测量０３ｍｍ以上的盲小孔，精度优于１μｍ。A theory of elastic transmission is developed. Based on this, a diaphragmatic probe for measuring blind small holes is designed. A diaphragm is used as a sensitive element and the stylus is regarded as an elastic element. The probe can be used to measure the small hole with diameter larger than 0.3mm and the accuracy is better than 1μm.

关 键 词：盲小孔 膜片 测头 补偿 

分 类 号：TH703.2[机械工程—仪器科学与技术]