溶胶-凝胶法制备ZnO薄膜光电导紫外光敏器件  

Photoconductive UV Sensor Based on ZnO Films Prepared by Sol-Gel Method

作　　者：高荣顺[1] 傅刚[1] 陈环[1] 

机构地区：[1]广州大学物理与电子工程学院,广东广州510006

出　　处：《压电与声光》2009年第2期227-229,233,共4页Piezoelectrics & Acoustooptics

摘　　要：利用溶胶-凝胶(Sol-Gel)法制备ZnO薄膜获得了响应速度快和灵敏度高的光电导型紫外光敏器件,并改善了器件的稳定性。采用正交试验表格L18[37]安排试验。分析后得到具有最佳响应时间和灵敏度的优化工艺参数为搅拌时间2.0 h,甩膜速率4000 r/min,甩膜层数3层,退火温度500℃,退火时间2.5 h,预处理温度200℃,叉指间距0.109 mm。测得器件上升时间5 s,下降时间3 s,在0.85 mW/cm2的紫外光强下的灵敏度(光电流与暗电流之比)R/R0为26,稳定性能良好。Rapid photo-response and high sensitivity UV sensor based on ZnO films were prepared by Sol-Gel method, and the stability was improved evidently. Experiments were arranged according to the orthogonal test table L18[3^7]. After analyzing effects of experiments, the optimized parameters were obtained with stirring time 2.0 h; rotate velocity 4 000 r/min; coated layers 3; annealing temperature 500 ℃; annealing time 2.5 h;drying tempera- ture 200 ℃ and inter digital spacing 0. 109 mm. The ascending and descending time of photo response was 5 s and 3 s respectively. The sensitivity （R/R0） under the UV light of 0.85 mW/cm2 was 26, showing good stability.

关 键 词：ZNO 溶胶-凝胶 正交试验 响应速度 灵敏度 

分 类 号：TN23[电子电信—物理电子学]