一种新型平面并联定位机构的误差建模与分析  

Errors Modeling and Analysis of a Novel Planar Parallel Positioning Mechanism

作　　者：李娟[1] 孙立宁[1] 刘延杰[1] 

机构地区：[1]哈尔滨工业大学机器人与系统国家重点实验室,黑龙江哈尔滨150080

出　　处：《压电与声光》2009年第2期284-288,共5页Piezoelectrics & Acoustooptics

基　　金：国家"九七三"计划基金资助项目(2003CB716202)

摘　　要：当前IC行业的迅速发展使得研制新型高速精密定位机构成为十分迫切的任务。针对这种需要,提出了一种新型平面并联定位机构,它由直线电机直接驱动含有平行四边形支链的并联杆机构来实现末端平台平面内的平动。首先根据输入、输出关系微分法建立了机构的误差模型,并对影响末端位姿误差的各类几何误差源进行了敏感性分析,给出了误差源对末端精度的敏感系数;然后基于误差映射矩阵,推导了机构定位误差极值表达式,并给出了已知误差源精度水平下,平台定位误差在工作空间内的分布情况。上述误差建模与分析方法对高精度的定位机构的设计及误差补偿具有重要的指导意义。With the quickly development of the IC industry, it is necessary to study a novel high speed and high precision positioning mechanism. Orient to this requirement, a novel precision positioning mechanism was presented in this paper. It consisted two parallelograms chains, and was droven directly by linear motors. Firstly, by differentiating the kinematic equations of the mechanism, the error model was built for this kind of planar parallel mechanism. Secondly based on the error model, the partial differentiate method was adopted to perform the error sensitivity analysis which described the contribution of each error component to the total position and orientation error of the mechanism. Then according to the sensitivity analysis results, the source errors that had more contribute to the positioning error of the end stage were pointed out. Lastly, based on the error mapping matrix, the positioning error extremum expression of the mechanism was deduced, and the distribution of the positioning error of the end stage over the global workspace was illustrated. The simulation experiment indicated that the positioning error of the mechanism in the plane was less than 0.02 mm. The above mentioned error modeling and analysis method had important instructional meaning for designing and error compensate for the high precision positioning mechanism.

关 键 词：定位机构 误差建模 精度分析 

分 类 号：TP242.2[自动化与计算机技术—检测技术与自动化装置]