表面处理对FED薄膜型金属电极性能的影响  

Influence of Surface Treatment on FED Metal-film Electrodes Properties

作　　者：许华安[1] 张永爱[1] 郭太良[1] 

机构地区：[1]福州大学物理与信息工程学院光电显示技术研究所,福建福州350002

出　　处：《现代显示》2009年第4期52-56,共5页Advanced Display

摘　　要：针对场致发射显示器(FED)金属薄膜与玻璃附着力的特性,提出一种超声清洗和UV清洗相结合技术应用于薄膜型金属电极表面清洁处理。本文分析了超声清洗和UV清洗的基本原理,利用绿灯观测装置和大面积视频显微镜检测不同超声清洗时间和频率以及UV清洗对金属电极质量的影响,利用场发射测试系统测试经表面处理前后的金属薄膜电极性能。实验结果表明,FED金属薄膜电极在32kHz超声清洗10min,UV光清洗5min后,电极表面干净,无尘埃和有机污物,金属膜层不脱落,显示器场发射性能稳定。In this paper the combination of ultrasonic cleaning and UV cleaning technology was applied to surface treatment of metal-film electrode in allusion to the properties of film adhension between metal-film and glass substrate. Essential mechanism of ultrasonic cleaning and UV cleaning technology was analysed. Different time and frequency of ultrasonic cleaning and UV cleaning effects on properties of metal-film electrode were discussed by dint of green light system and video microscope. The properties of metal-film electrode treated with surface cleaning were tested by field emission system. It shows that FED metal-film electrode surface is clean, without atomy and organic menstruum, metal films are firm and the propertied of field emission is steady with ultrasonic cleaning at 32kHz/10min and UV cleaning for 5 minutes.

关 键 词：场致发射显示器 金属薄膜电极 超声清洗 UV清洗 

分 类 号：TN383.1[电子电信—物理电子学]