聚合物双层微悬臂梁传感器光热激励的特性及模拟优化  

Performance and Optimization of Bi-material Polymeric-based Micro-cantilever Excited by Light and Heat

作　　者：白英良[1,2] 韩立[1] 

机构地区：[1]中国科学院电工研究所,北京100080 [2]中国科学院研究生院,北京100039

出　　处：《仪表技术与传感器》2009年第3期1-3,共3页Instrument Technique and Sensor

摘　　要：文中研究了聚合物基双层悬臂梁在光强和温度变化的激励下的挠度特性,并利用建立的数学模型通过采用M atlab程序进行了模拟和优化。实验得出:在热激励下聚合物(PMMA)悬梁镀金以及悬梁和金属膜厚度比值为0.1时最优化;在光激励下聚合物悬梁镀铬以及悬梁和金属膜厚度比值为0.03时最优化。研究为制作聚合物双层传感器的研制提供了理论分析和优化设计的基础。The bi-metallic micro-cantilevers can exhibit static defection as a result of thermal effects. This paper presented the performance of the biomaterial polymeric-based cantilever excited by the temperature and light. The experiment shows that the optimization result of cantilever excited by the heat is that gold is coated and the thickness rate is 0.1. And the optimization result of cantilever excited by the light is that chromium is coated and the thickness rate is 0. 03. The research applied the basis for the theory analysis and optimization of the invention of the novel sensors.

关 键 词：聚合物基双层微悬臂梁 光热激励 特性研究 仿真优化 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]