大气压中频氩/丙酮等离子体发射光谱诊断  

Optical Emission Spectroscopy (OES) Diagnosis of Acetone Species in Intermediate Frequency Argon Plasma at Atmospheric Pressure

作　　者：程曼丽[1] 唐晓亮[2,3,4] 陈小立[1,3] 朱泉[1] 

机构地区：[1]东华大学化学化工与生物工程学院,上海201620 [2]国家染整工程技术研究中心东华大学,上海201620 [3]东华大学理学院,上海201620 [4]东华大学材料科学与工程学院,上海201620

出　　处：《光散射学报》2009年第1期82-87,共6页The Journal of Light Scattering

基　　金：国家染整工程技术研究中心开放课题基金项目(RZ0702)

摘　　要：目前,等离子体发射光谱应用于中频丙酮等离子体的研究鲜有报道。自建大气压氩?丙酮喷射中频交流放电等离子体装置,采用HR2000光纤光栅光谱仪对放电光谱进行记录,并对实验中的光谱信号进行分析诊断。研究结果说明,对大气压环境下,使用氩气为"载气",对可挥发有机溶剂进行等离子发射光谱分析是一种可行的技术;大气压下丙酮等离子体的活性成分和真空环境下丙酮等离子体产生的活性成分有很大区别,氧元素对两种气压下等离子体活性成分有很大改变;这种诊断方法对大气压下挥发性有机试剂的等离子体化学反应原理的研究,有重要的指导意义。此外,文中展示了大气压下丙酮沉积膜在两种光源下的形貌图,结果说明在一定实验条件下得到了连续的沉积膜。Recently, there are few studies have investigated the optical emission spectroscopy diagnosis of acetone species in intermediate frequency argon/acetone plasma at atmospheric pressure. Argon / acetone plasma jet was generated from a nozzle using an AC discharge in intermediate frequency at atmospheric pressure. The spectral lines of argon and acetone plasma emission were obtained and analyzed by using HR2000 spectral diagnosis equipment. The experimental results indicate that spectral diagnosis has been proved a workable method. It is significant for the application of OES diagnosis of volatile organic reagent in argon plasma, and is important to the concept of plasma polymerization of volatile organic reagent. There exist large differences in the activity species of acetone plasma between at atmospheric pressure and under vacuum condition, and oxygen is the most important influencing factor. In addition, the paper shows the topography of the deposition acetone film with two light sources, He-Ne laser light and the strong white light source. The topography indicates that through experiment, achieved a continuous deposition film in intermediate frequency plasma at atmospheric pressure.

关 键 词：介质阻挡放电 光谱诊断 大气压 中频 氩 丙酮 

分 类 号：O461.2[理学—电子物理学]